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Helmholtz Nano Facility (HNF)
WIKI
See Overview WIKI
Access
See Overview Access
Registration Access
Cleanroom Instructions
User office/Contact
Usage costs
Technology help?
Data privacy
Tools & Booking
See Overview Tools & Booking
List of devices
Allowed resists
Allowed developer
Allowed solvents / adhesion promoter
Banned materials
Technology
See Overview Technology
Development
▾
Low T Etching of Silicon
Research
News
See Overview News
Messages
▾
HNF sets RCD-8 into operation
▾
Interposer for Quantum Computing
Brief News
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Downloads
Downloads
HNF User Manual
Runsheet Example
Last Modified: 03.07.2023
